侵徹武器穿入地面等堅硬物質的加速度可達重力加速度的2 萬倍至幾十萬倍， 要求所用加速度傳感器既能抗擊該工作環境， 又能識別沖擊與鉆入的整個過程。美國侵徹武器用MEMS 大g 值加速度計屬電容傳感器， 其工作原理采用2 個電參數完全相同的電容，1 個作檢測電容，1 個作參考電容， 將被測加速度值的變化轉換成電容量的變化而實現。該加速度計由結構單元和信號處理電路組成。實驗結果表明， 尚需對2 組成部分進一步集成， 對機械靜電阻尼進行優化， 對封裝深入研究。
關 鍵 詞 ： 大g 值加速度計； 電容傳感器； 微機電系統（MEMS）； 侵徹武器
Abstract: The acceleration of penetrator weapon when it irrupts into ground firm substance is twenty thousand times to hundreds thousand of times of gravity acceleration, the acceleration sensor that was required not only oppugns work circumstance but also identifies the process of concussion and irruption. High-g accelerometer in MEMS for USA penetrator weapon pertains to capacitance sensor, its operational principle is that 2 capacitances with same electric parameter are used, one used as test, and another used as reference, and that the change of acceleration value tested is transformed in the change of capacitance quantity. High-g accelerometer consists of structure unit and the signal processing circuit. The tested results show that 2 parts of structure unit and the signal processing circuit should be integrate d and the mechanical static damp is optimized, the encapsulation is researched.
Key Words: High-G Accelerometer; Capacitance sensor; MEMS; Penetrator Weapon