介紹了激光干涉莫爾信號(hào)差動(dòng)式精密定位方法，提出了精密定位裝置的粗控和微控兩段式控制方式，擴(kuò)大了裝置的定位控制范圍，又有效地縮短精密定位時(shí)間，實(shí)現(xiàn)裝置寬控制范圍的高速高精度控制?！?BR>關(guān)鍵詞：激光莫爾信號(hào)，精密定位控制，定位時(shí)間，定位精度
Control over high alignment accuracy and high speed of a precision alignment system based on laser moire signals ZHOU Lizhong1, Xie Yong1, Furuhashi Hideo2, Uchida Yoshiyukl2
(1.Information Engineering School,Yangzhou Univ. ,Yangzhou 225009,China;2.Information Network Engineering Department of Aichi Instiute of Technology.Japan) Abstract：This article introdnces principle of the differential precision positioning using laser Moire signals and discusses the macro-control type and micro-control type of a precision alignment system. The principle expands the control range and effectizely shortens precision alignment time for precision alignment. It com fulfil control over high alignment accuracy and high speed of a precision alignment system.　
Key Words：Laser moire signals，Control over precisioni positioning，Alignment time， Alignment accuracy